The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience. Focusing on the basic theory needed to design, develop, analyze, and prototype high-performance devices, components, and structures, it shows how to analyze processes, phenomena, and properties at nano- and micro-scales and illustrates development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.

Overview and Introduction. New Trends in Engineering and Science: Micro- and Nanoscale Systems. Fundamentals of MEMS Fabrication. Devising and Synthesis of MEMS and NEMS. Modeling of Micro- and Nanoelectromechanical Systems, Devices, and Structures. Nanosystems, Quantum Mechanics, and Mathematical Models. Control of Microelectromechanical Systems. Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided Design of MEMS. Index.