Silicide Technology for Integrated Circuits focuses on the task of developing and applying metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages and provides guidance on the application of the latest emerging technology.

• Chapter 1: Silicides - an introduction


• Chapter 2: Silicide formation


• Chapter 3: Titanium silicide technology


• Chapter 4: Cobalt silicide technology


• Chapter 5: Nickel silicide technology


• Chapter 6: Light-emitting iron disilicide


• Chapter 7: Silicide contacts for Si/Ge devices


• Chapter 8: Silicide technology for SOI devices


• Chapter 9: Characterisation of metal silicides