jia su du ji shi ce liang zai ti yun dong guo zai huo zhen dong jia su du de yi biao shi dao hang zhi dao yi ji yun dong zhuang tai jian ce xi tong zhong zui ji ben de min gan yuan jian zhi yi zai hang kong hang tian zuan tan she bei bing qi gao duan min yong xiao fei lei qi che dian zi deng duo xing zhuang bei chan pin zhong de xu qiu yue lai yue duo di wen gong shao tao ci low temperature co fired ceramic jian cheng LTCC ji ban shi yi zhong zhong yao de xi tong ji feng zhuang system in package jian cheng SiP duo ceng hua ji ban ta ju you chu se de dian xing neng he ji xie te xing nei bu ju you gao mi du li ti hu lian bing qie you wang tong guo zai nei bu qian ru wei gong neng jie gou he wu yuan dian lu yuan jian cong er zai feng zhuang ceng ci shang shi xian gao mi du xi tong ji cheng ben shu zhu yao jie shao de LTCC wei jia su du ji shi wei guan xing qi jian li xue chuan gan qi ji shu xi tong ji feng zhuang ji ban ji shu xiang jie he de chan wu ke wei yi lei xin de MEMS LTCC MEMS ben shu shou xian jie shao le wei jia su du ji he LTCC de xiang guan zhi shi ran hou jie shao le wei jia su du ji gong zuo de shu xue mo xing bing ju ci jiang shu le wei jia su du ji de she ji fang fa bing ti chu le si zhong jie gou xing shi zai jie xi fen xi de ji chu shang li yong ge zhong shu zhi fang zhen gong ju zhao dao le ying xiang jia su du ji min gan xing fei xian xing dong jing tai xiang ying te xing yi ji xi tong ke kao xing deng xing neng can shu de ge zhong yin su ran hou yun yong you xian yuan ruan jian Ansys dui jie gou mo xing jin xing le you xian yuan fang zhen yan jiu le bu tong xing zhuang de jia su du jie gou de ying li fen bu mo tai xiang ying deng qing kuang bing qie dui yang pin jin xing le re xue dian xue deng fang mian de xing neng ce shi zui hou gen ju ce shi jie guo dui she ji jin xing le you hua

guo shi chao nan 1988 nian sheng ren ji guan he bei sheng zhang jia kou shi xue li shuo shi yan jiu sheng yu 2010 nian zhi 2013 nian zai bei jing da xue gong du shuo shi yan jiu sheng xue wei shi cong wei xi tong feng zhuang yan jiu zhuan jia jin yu feng jiao shou zhe qi jian zhong dian guan zhu de shi ji yu LTCC cai liao de MEMS qi jian she ji ji jia gong bing ji yu ci fa biao le duo pian xiang guan lun wen yan jiu sheng bi ye hou yu zhong guo ke xue yuan di zhi yu di qiu wu li yan jiu suo MEMS shi yan shi gong zuo ji xu cong shi MEMS chuan gan qi feng zhuang fang mian de gong zuo