Piezoelectric systems are widely employed in precision engineering and the capability for precision tracking at broadband frequencies is increasingly appealing. However, the performance of dynamic tracking is limited over a wide range of frequencies, because of the coupled hysteresis, creep, and vibration dynamics. This book thus presents the modeling and control of piezoelectric systems over a broad range of frequencies. The mathematical and physical modeling are proposed as well as the model-based feedforward and several feedback approaches. This book is suitable for graduates and researchers in precision engineering, especially interested in high-speed and precision motion of instruments.

Received the B.Eng.(2005)and PhD(2011)degrees from Harbin Institute of Technology. Received the second PhD degree from National University of Singapore in 2012. He is with School of Aeronautics and Astronautics, Dalian University of Technology. Research interests: precision mechatronics, precision motion control, vibration control and beam control.